Technical Notes
Mixed alkyl-cyclopentadienyl platinum compound with beneficial precursor properties for the deposition of platinum thin films by CVD and ALD.
References:
1. Inorg. Chem., 1989, 28, 872.
Technical Notes
Mixed alkyl-cyclopentadienyl platinum compound with beneficial precursor properties for the deposition of platinum thin films by CVD and ALD.
References:
1. Inorg. Chem., 1989, 28, 872.
Strem