Technical Notes:
1.Mixed cyclopentadienyl carbonyl precursor for the deposition of rheniur
ALD with good volatility.
References:
1. J. Organomet. Chem. 1967. 8. 287.
2.J. Organomet. Chem. 1998. 553. 443.
Technical Notes:
1.Mixed cyclopentadienyl carbonyl precursor for the deposition of rheniur
ALD with good volatility.
References:
1. J. Organomet. Chem. 1967. 8. 287.
2.J. Organomet. Chem. 1998. 553. 443.
Strem