Technical Notes:
1.ALD/CVD precursor for molybdenum thin film deposition
References:
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2.Chem. Vap. Deposition 2008 14, 71.
3.Thin Solid Films 2008, 516, 6041 .
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8.Thin Solid Films 2019, 692, 137607.
9.J. Vac. Sci. Technol. A.2021. 39, 012407.