Technical Notes:
1.Manganese amidinate precursor for the deposition of manganese containing thin films.
References:
1.Proc. Adv. Metallization Conf. 2009. 2.J. Electrochem. Soc. 2011 158. D248.
3.J. Phys. Chem. c 2012 116, 23585
Technical Notes:
1.Manganese amidinate precursor for the deposition of manganese containing thin films.
References:
1.Proc. Adv. Metallization Conf. 2009. 2.J. Electrochem. Soc. 2011 158. D248.
3.J. Phys. Chem. c 2012 116, 23585
Strem