产品说明
应用
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.
包装
5 mL in glass bottle
基本信息
线性分子式 | [(CH3)3SiO]4Si |
分子量 | 384.84 |
EC 号 | 222-613-4 |
MDL编号 | MFCD00051587 |
PubChem化学物质编号 | 24868927 |
NACRES | NA.22 |
产品性质
质量水平 | 100 |
测定 | 97% |
折射率 | n |
bp | 103-106 ℃/2 mmHg (lit.) |
密度 | 0.87 g/mL at 25 ℃ (lit.) |
SMILES string | C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C |
InChI | 1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3 |
InChI key | VNRWTCZXQWOWIG-UHFFFAOYSA-N |
安全信息
象形图 | |
警示用语: | Warning |
危险声明 | H315 - H319 - H335 |
预防措施声明 | P261 - P264 - P271 - P280 - P302 + P352 - P305 + P351 + P338 |
危险分类 | Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3 |
靶器官 | Respiratory system |
储存分类代码 | 10 - Combustible liquids |
WGK | WGK 3 |
闪点(F) | 168.8 °F - closed cup |
闪点(C) | 76 ℃ - closed cup |
个人防护装备 | Eyeshields, Gloves, type ABEK (EN14387) respirator filter |