应用
It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.

备注
Store in a cool, dry, well- ventilated area. Incompatible with oxidizing agents.

基本信息

MDL
MFCD01310208

EINECS
235-082-9

分子式
Ti₅Si₃

分子量
323.76

熔点
2130°

灵敏度
Ambient temperatures.

形态
-325 Mesh Powder

溶解性
Soluble in hydrofluoric acid. Insoluble in water.

GHS危害和防范说明

GHS符号

Hazard Statements
H228-H315-H319-H335
Flammable solid.Causes skin irritation.Causes serious eye irritation.May cause respiratory irritation.

Precautionary Statements
P210-P261-P280-P305+P351+P338-P405-P501a
Keep away from heat/sparks/open flames/hot surfaces. - No smoking.Avoid breathing dust/fume/gas/mist/vapours/spray.Wear protective gloves/protective clothing/eye protection/face protection.IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.Store locked up.Dispose of contents/container in accordance with local/regional/national/international regulations.

安全信息

危险等级
4.1

包装组
III

危险类别
11-36/37/38
Highly flammable.Irritating to eyes, respiratory system and skin.

安全等级
26-37-60
In case of contact with eyes, rinse immediately with plenty of water and seek medical advice.In case of contact with eyes, rinse immediately with plenty of water and seek medical advice.This material and its container must be disposed of as hazardous waste

欧盟危险品标志

TSCA
是